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Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
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MYU K.K.
Sensors and Materials
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is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 23, Number 2 (2011)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 121-133
S&M832 Research Paper https://doi.org/10.18494/SAM.2011.686 Published: March 1, 2011 In-Phase Coupling Forces Induced by Air Flow and Drive Force in Split-Mode Silicon Micromachined Linear Vibratory Gyroscopes [PDF] Wenwen Zhou, Bin Zhou, Zhiyong Chen and Rong Zhang (Received March 1, 2010; Accepted June 17, 2010) Keywords: coupling forces, air damping, vacuum package, vibratory microgyroscopes
In this paper, we report on the sources, variations and identification of in-phase coupling forces induced by air flow and drive force in split-mode silicon micromachined linear vibratory gyroscopes. Air damping coupling force and drive coupling force are two main components of in-phase coupling forces, derived from air flow and fabrication imperfections, respectively. The expression of in-phase coupling forces induced by these two factors is given and their existence is demonstrated by a novel coupling identification method. Experimental data indicate that air damping coupling is the dominant coupling force in in-phase coupling. The sensitivity of in-phase coupling to vacuum will be a theoretical instruction to packaging requirements and 1 Torr is an optimum vacuum not requiring complex packaging technology, but restraining in-phase coupling forces effectively.
Corresponding author: Rong Zhang Cite this article Wenwen Zhou, Bin Zhou, Zhiyong Chen and Rong Zhang, In-Phase Coupling Forces Induced by Air Flow and Drive Force in Split-Mode Silicon Micromachined Linear Vibratory Gyroscopes, Sens. Mater., Vol. 23, No. 2, 2011, p. 121-133. |
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