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Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
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is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 19, Number 2 (2007)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 107-121
S&M669 Research Paper Published: 2007 Transverse Electromagnetic Microactuators Using Electroplated Planar Coil Driven by Symmetric Twin Magnets [PDF] Ji-Chul Ryu and Young-Ho Cho (Received September 20, 2006; Accepted February 21, 2007) Keywords: electromagnetic microactuator, radial magnetic field, twin magnets, electroplating
In this paper, we present an electromagnetic microactuator that uses an electroplated copper coil on a p+-silicon diaphragm with symmetric twin magnets. The microactuator generates a vertical motion of the diaphragm using the radial components of the magnetic field on the coil plane. To guide and concentrate the magnetic field in the radial direction, we propose a new microactuator structure with symmetric twin magnets. The microactuator shows values of resonant frequency and quality factor in the ranges of 10.51±0.22 kHz and 46.6±3.3, respectively. The twin magnet microactuator generates the maximum peak-to-peak amplitude of 4.4 µm for an AC rms current of 26.8 mA, showing 2.4 times larger amplitude than the single magnet microactuator.
Corresponding author: Young-Ho Cho Cite this article Ji-Chul Ryu and Young-Ho Cho, Transverse Electromagnetic Microactuators Using Electroplated Planar Coil Driven by Symmetric Twin Magnets, Sens. Mater., Vol. 19, No. 2, 2007, p. 107-121. |
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