S&M Young Researcher Paper Award 2020
Recipients: Ding Jiao, Zao Ni, Jiachou Wang, and Xinxin Li [Winner's comments]
Paper: High Fill Factor Array of Piezoelectric Micromachined
Ultrasonic Transducers with Large Quality Factor

S&M Young Researcher Paper Award 2021
Award Criteria
Notice of retraction
Vol. 32, No. 8(2), S&M2292

Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Smooth Surface with U-groove Structures for Light-detecting Area of Photodetectors Using Dual-doped TMAH

Kamonwan Suttijalern and Surasak Niemcharoen

(Received May 15, 2021; Accepted September 1, 2021)

Keywords: U-groove structure, anisotropic etching, oxidizing agent, smooth surface, silicon photodetectors

Microelectromechanical system (MEMS) fabrication has gained popularity as a means of etching silicon substrates. This paper discusses the surface texturization of a U-groove structure by a very simple and cost-effective technique for use as a U-groove metal–semiconductor–metal (UMSM) photodetector with aluminum/n-Si/aluminum materials. A series of etching experiments were carried out involving the addition of ammonium peroxodisulfate [(NH4)2SO4] at different concentrations to tetramethyl ammonium hydroxide (TMAH)/silicic acid etching solution, also called dual-doped TMAH. It was found that the addition of 11.5 g/l (NH4)2SO4 to TMAH/silicic acid enhances the smoothness of the surface and prevents the unwanted etching of exposed aluminum. We utilized dual-doped TMAH in the fabrication of a nanostructure in a U-groove photodetector and found that the U-groove photodetector has a ~59% higher photocurrent than that of a planar photodetector. The U-groove photodetector demonstrates that increasing the light-detecting area results in high photocurrent performance for high-efficiency optical devices.

Corresponding author: Surasak Niemcharoen

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