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Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
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MYU K.K.
Sensors and Materials
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is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 17, Number 4 (2005)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 179-186
S&M596 Research Paper of Special Issue Published: 2005 Characterization of Orientation-Dependent Etching Properties of Quartz: Application to 3-D Micromachining Simulation System [PDF] Di Cheng, Kazuo Sato, Mitsuhiro Shikida, Atsushi Ono, Kenji Sato, Kazuo Asaumi and Yasuroh Iriye (Received Ocober 1, 2004; Accepted March 17, 2005) Keywords: anisotropic etching, orientation dependence, ammonium bifluoride, single-crystal alpha-quartz
Novel characterization results of anisotropic etching properties of single-crystal alpha- quartz for a number of orientations using a spherical specimen are reported. The dimen- sions of the specimen’s surface were measured before and after etching, and the changes were used to calculate the etching rates for a single etching operation for a number of orientations. The etching rates were high at the Z-axis, but not the highest. Low etching rates, sometimes close to zero, were measured for directions perpendicular to the Z-axis. We first report the etching rate distribution perpendicular to the Z-axis. The estimated etching rates further allow us to simulate complete three-dimensional etching for arbi- trarily oriented quartz wafers.
Corresponding author: Di Cheng Cite this article Di Cheng, Kazuo Sato, Mitsuhiro Shikida, Atsushi Ono, Kenji Sato, Kazuo Asaumi and Yasuroh Iriye, Characterization of Orientation-Dependent Etching Properties of Quartz: Application to 3-D Micromachining Simulation System, Sens. Mater., Vol. 17, No. 4, 2005, p. 179-186. |
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Special Issue on Advanced Micro/Nanomaterials for Various Sensor Applications (Selected Papers from ICASI 2024)
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- A Prototype Portable Voltammetric Sensor for Determining Titratable Acidity of Sake and Moromi
Akira Kotani, Kokoro Taniguchi, Koichi Machida, Kazuhiro Yamamoto, and Hideki Hakamata - PACKTEST for L-Glutamate Quantification: Development of On-site and High-throughput Analytical Kits using L-Glutamate Oxidase Mutant
Keita Murai, Hiroki Yamaguchi, Satoru Furuuchi, Kazutoshi Takahashi, Uno Tagami, Moemi Tatsumi, Toshimi Mizukoshi, Hiroshi Miyano, Shuntaro Okauchi, and Masayuki Sugiki - Development of Portable Multi-fluorescence Detection System Using Indium Tin Oxide Heater for Loop-mediated Isothermal Amplification
Ryo Ishii, Sota Hirose, Shoji Yamamoto, Kazuhiro Morioka, Akihide Hemmi, and Hizuru Nakajima - Reproduction of Absorption Spectra of Bromothymol Blue–Methyl Red Mixed Indicator from RGB and L*a*b* Color Coordinates and Application to Fast Spectrum Acquisition
Yusuke Kimura, Arinori Inagawa, and Nobuo Uehara - Orthogonality of α-Sulfoquinovosidase in Human Cells and Development of Its Fluorescent Substrate
Ryosuke Yoshida, Ryosei Kaguma, Ryosuke Kaneko, Ichiro Matuso, Makoto Yoritate, Go Hirai, Takamasa Teramoto, Yoshimitsu Kakuta, Kosuke Minamihata, Noriho Kamiya, Teruki Nii, Akihiro Kishimura, Takeshi Mori, and Yoshiki Katayama
- A Prototype Portable Voltammetric Sensor for Determining Titratable Acidity of Sake and Moromi
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- Healthcare System from Multisensor Collaboration and Human Action Recognition
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