pp. 335-344
S&M90 Research Paper Published: 1991 Pressure Sensor Using Polycrystalline Silicon Thin Film Strain Gauge with Hybrid IC Amplifier [PDF] Fujio Sato, Yukio Sakamoto, Hisayoshi Hashimoto and Morio Tamura Cite this article Fujio Sato, Yukio Sakamoto, Hisayoshi Hashimoto and Morio Tamura, Pressure Sensor Using Polycrystalline Silicon Thin Film Strain Gauge with Hybrid IC Amplifier, Sens. Mater., Vol. 3, No. 6, 1991, p. 335-344. |