pp. 135-142
S&M795 Letter https://doi.org/10.18494/SAM.2010.659 Published: April 28, 2010 Design and Fabrication of a Scanning Near-Field Microscopy Probe with Integrated Zinc Oxide Photoconductive Antennas for Local Terahertz Spectroscopy [PDF] Kentaro Iwami, Takahito Ono and Masayoshi Esashi Keywords: micro-electromechanical systems (MEMS), terahertz, scanning near-field optical microscopy, terahertz time-domain spectroscopy, zinc oxide
In this paper, we report the design and fabrication of a scanning near-field optical microscopy (SNOM) probe with integrated zinc oxide photoconductive antennas for local terahertz (THz) spectroscopy. Photoconductive antennas are used as a THz pulse emitter and detector. A pyramidal tip with an aperture formed at the end of a silicon cantilever is used as an SNOM head.
Corresponding author: Kentaro IwamiCite this article Kentaro Iwami, Takahito Ono and Masayoshi Esashi, Design and Fabrication of a Scanning Near-Field Microscopy Probe with Integrated Zinc Oxide Photoconductive Antennas for Local Terahertz Spectroscopy, Sens. Mater., Vol. 22, No. 3, 2010, p. 135-142. |