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Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
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Sensors and Materials
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is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 22, Number 2 (2010)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 61-70
S&M789 Research Paper https://doi.org/10.18494/SAM.2010.606 Published: March 5, 2010 Atomic Oxygen Sensing Using a Quartz Crystal Microbalance with a Polymer Thin Film Prepared by RF Sputtering [PDF] Hiroyuki Matsumoto, Mikihiko Matsuoka, Satoru Iwamori and Kazutoshi Noda (Received February 27, 2009; Accepted July 6, 2009) Keywords: atomic oxygen, quartz crystal microbalance, polyimide, RF sputtering
Polymer thin films, sputtered using a polyimide target on a quartz crystal, were investigated to determine their suitability for application in active oxygen sensors. Active oxygen generated under an inductively coupled plasma (ICP), particularly atomic oxygen radicals with a flux of 6.93×1013 atoms/cm2/s, was successfully detected from the frequency shift using a polymer-coated quartz crystal microbalance (QCM). To investigate the reaction mechanism between the polymer surface and atomic oxygen, chemical bonding was evaluated by electron spectroscopy for chemical analysis (ESCA) and surface morphology by atomic force microscopy (AFM). We also compared sputter-coated polymers with spin-coated polymers in terms of their sensing characteristics. We found that a sputter-coated polymer QCM has a great potential for atomic oxygen sensing.
Corresponding author: Hiroyuki Matsumoto Cite this article Hiroyuki Matsumoto, Mikihiko Matsuoka, Satoru Iwamori and Kazutoshi Noda, Atomic Oxygen Sensing Using a Quartz Crystal Microbalance with a Polymer Thin Film Prepared by RF Sputtering, Sens. Mater., Vol. 22, No. 2, 2010, p. 61-70. |
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