S&M Young Researcher Paper Award 2020
Recipients: Ding Jiao, Zao Ni, Jiachou Wang, and Xinxin Li [Winner's comments]
Paper: High Fill Factor Array of Piezoelectric Micromachined
Ultrasonic Transducers with Large Quality Factor

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Vol. 32, No. 8(2), S&M2292

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Sensors and Materials, Volume 33, Number 10(2) (2021)
Copyright(C) MYU K.K.
pp. 3603-3612
S&M2711 Research Paper of Special Issue
Published: October 20, 2021

Development of Lead-free Force-feedback Tactile Sensor Fabricated from BiFeO3 Piezoelectric Film [PDF]

David T. W. Lin, Kun-Dar Li, Po-Chang Chen, and Jia-Yun Kuo

(Received May 24, 2021; Accepted October 1, 2021)

Keywords: tactile sensor, sol-gel, thin film, BiFeO3

In this study, we develop a flexible lead-free BiFeO3 (BFO) film sensor that can be applied on complex surfaces of devices. This sensor is fabricated by depositing BFO thin film on a polyimide (PI)-coated copper substrate. The sol–gel (SG) method and spin-coating method are utilized to prepare the BFO piezoelectric film. Two different spin-coating processes under three different sets of parameters and two different annealing temperatures are used in the fabrication. X-ray diffraction (XRD) and scanning electron microscopy are used to examine the crystallinity and surface topography of the BFO thin films, respectively. A lifetime test is performed on the device to validate the robustness of its piezoelectric properties, and a linear scaling relationship between the force and output response is obtained. We propose suitable conditions for preparing the piezoelectric film and demonstrate the reliability of this sensor.

Corresponding author: Kun-Dar Li

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Cite this article
David T. W. Lin, Kun-Dar Li, Po-Chang Chen, and Jia-Yun Kuo, Development of Lead-free Force-feedback Tactile Sensor Fabricated from BiFeO3 Piezoelectric Film, Sens. Mater., Vol. 33, No. 10, 2021, p. 3603-3612.

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