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Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
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Sensors and Materials
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is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 31, Number 3(1) (2019)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 751-761
S&M1811 Research Paper of Special Issue https://doi.org/10.18494/SAM.2019.2120 Published: March 8, 2019 Thermal Effusivity Calibration Procedure for Thermal Microscope [PDF] Shugo Miyake, Tetsuya Ohtsuki, Takaaki Awano, Kimihito Hatori, and Makoto Sekine (Received August 25, 2018; Accepted November 5, 2018) Keywords: thermoreflectance, thermal microscope, thermal effusivity, molybdenum thin film
In this paper, a thermal effusivity calibration procedure is proposed using a numerical calculation and measurement of a phase lag of a thermoreflectance signal based on a periodic modulation thermoreflectance method for a thermal microscope. To improve the accuracy of the estimated thermal effusivity, the profile determination of the heating and probing laser beams and the numerical calculation of phase lags with a two-layer model in a three-dimensional heat conduction equation are carried out. Results of the experiments of beam profile determination and numerical calculation showed that the estimated values of thermal effusivities are in good agreement with the standard values of silicon, germanium, and Pyrex® samples. We are convinced that the use of a thermal microscope with numerical calibration is becoming an accurate and precise thermal property measurement technique for the microscale range.
Corresponding author: Shugo Miyake  This work is licensed under a Creative Commons Attribution 4.0 International License. Cite this article Shugo Miyake, Tetsuya Ohtsuki, Takaaki Awano, Kimihito Hatori, and Makoto Sekine, Thermal Effusivity Calibration Procedure for Thermal Microscope, Sens. Mater., Vol. 31, No. 3, 2019, p. 751-761. |
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