Notice of retraction
Vol. 32, No. 8(2), S&M2292

ISSN (print) 0914-4935
ISSN (online) 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.

Instructions to authors
English    日本語

Instructions for manuscript preparation
English    日本語

Template
English

Publisher
 MYU K.K.
 Sensors and Materials
 1-23-3-303 Sendagi,
 Bunkyo-ku, Tokyo 113-0022, Japan
 Tel: 81-3-3827-8549
 Fax: 81-3-3827-8547

MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.


MYU Research

(proofreading and recording)


MYU K.K.
(translation service)


The Art of Writing Scientific Papers

(How to write scientific papers)
(Japanese Only)

Sensors and Materials, Volume 28, Number 6 (2016)
Copyright(C) MYU K.K.
pp. 689-694
S&M1226 Research Paper of Special Issue
https://doi.org/10.18494/SAM.2016.1334
Published: June 22, 2016

GaN Thin Films Deposited on n-Si (111) Substrate with a Metal Organic Chemical Vapor Deposition System for Sensing Ultraviolet Light [PDF]

Tse-Heng Chou

(Received March 13, 2015; Accepted March 18, 2016)

Keywords: cubic β-SiC, porous β-SiC, rapid thermal chemical vapor deposition, ultraviolet, photo and dark current ratios

Metal organic chemical vapor deposited GaN thin films on n-Si (111) substrates with cubic β-SiC (c-SiC) and porous β-SiC (PSC) buffer layers were characterized and compared with each other. We used rapid thermal chemical vapor deposition (RTCVD) to grow the c-SiC layers, and some of them were electrochemically anodized to obtain the PSC layers. Then the deposited GaN films were characterized with X-ray diffraction (XRD), Fourier transform infrared spectroscopy (FTIR), atomic force microscopy (AFM), scanning electron microscopy (SEM), and Raman spectroscopy. To study the GaN thin films for ultraviolet-detecting applications, we measured the photo and dark currents of a metal-semiconductor-metal (MSM) photodiode with and without the irradiance of an ultraviolet (UV) light source (366 nm, 6 mW/cm2). The photo and dark current ratios (PDCRs) of both structures are high at room temperature, especially for the devices on the PSC buffer layer; a value of as high as 6.75 × 105 under −1 V bias has been achieved. We attribute the high PDCR to the suppression of the induced stress in the GaN film by the PSC buffer layer.

Corresponding author: Tse-Heng Chou


Cite this article
Tse-Heng Chou, GaN Thin Films Deposited on n-Si (111) Substrate with a Metal Organic Chemical Vapor Deposition System for Sensing Ultraviolet Light, Sens. Mater., Vol. 28, No. 6, 2016, p. 689-694.



Forthcoming Regular Issues


Forthcoming Special Issues

Special Issue on Sensors and Materials: Emerging Investigators in Japan
Guest editor, Tsuyoshi Minami (The University of Tokyo)


Special issue on Novel Materials and Sensing Technologies on Electronic and Mechanical Devices (2)-1
Guest editor, Teen-Hang Meen (National Formosa University), Wenbing Zhao (Cleveland State University), and Hsien-Wei Tseng (Longyan University)


Special Issue on Materials, Devices, Circuits, and Analytical Methods for Various Sensors (4)
Guest editor, Chien-Jung Huang (National University of Kaohsiung), Cheng-Hsing Hsu (National United University), Ja-Hao Chen (Feng Chia University), and Wei-Ling Hsu (Huaiyin Normal University)
Conference website


Special issue on Novel Materials and Sensing Technologies on Electronic and Mechanical Devices (2)-2
Guest editor, Teen-Hang Meen (National Formosa University), Wenbing Zhao (Cleveland State University), and Hsien-Wei Tseng (Longyan University)


Special Issue on New Trends in Robots and Their Applications
Guest editor, Ikuo Yamamoto (Nagasaki University)


Special Issue on Artificial Intelligence in Sensing Technologies and Systems
Guest editor, Prof. Lin Lin (Dalian University of Technology)
Call for paper


Copyright(C) MYU K.K. All Rights Reserved.