In this research, we propose a wireless nonfloating-type thermal convection accelerometer. The heaters and thermal sensors of the accelerometer were made on a flexible substrate with a stacking layer (aluminum nitride of 1 mm thickness), and it is different from traditional structures with a grooved chamber in the silicon substrate. Thus, one can integrate it and a wireless radio frequency identification (RFID) antenna on the same substrate, making it easy for fabrication and use. Moreover, xenon gas was applied to avoid the oxidizing effect produced by the previous ones with CO2 or air to increase the heater's reliability and life cycle. The performances of a traditional rectangular chamber with xenon or CO2 without a stacking layer had nonlinear effects. However, the cases with a stacking layer and xenon gas are always better. Both sensitivity and response time comparisons with a rectangular chamber, a stacking material, and filled by CO2 were also made (sensitivity: 0.182 ℃/G); the sensitivity of the new one with a hemicylindrical chamber, xenon gas, and stacking layer was better (0.227 ℃/G) and without a nonlinear effect in larger accelerations. Besides, the response times using either the hemicylindrical chamber and/or xenon gas were faster than those with the rectangular chamber and CO2 (600 μs).. The quickest one is 310 μs by applying the proposed ideas.