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Vol. 32, No. 8(2), S&M2292

ISSN (print) 0914-4935
ISSN (online) 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
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Sensors and Materials, Volume 17, Number 4 (2005)
Copyright(C) MYU K.K.
pp. 167-177
S&M595 Research Paper of Special Issue
Published: 2005

Simulation of Anisotropic Etching of Alpha-Quartz for Computer-Aided-Design System [PDF]

Hisanori Hayashi and Toshitsugu Ueda

(Received October 1, 2004; Accepted March 29, 2005)

Keywords: quartz, anisotropic etching, 3D CAD

Alpha-quartz anisotropic etching is a powerful tool for micromachining for the fabrica- tion of various devices by photolithography. Therefore, this technique can help sensor engineers to develop computer-aided-design (CAD) systems. In this study, we estimated the etching rates of alpha-quartz wafers for all cut angles on the basis of our experimental data. Then, the configuration of the alpha-quartz wafer faces was predicted with the etching rate profile calculated from the experimental data. These results confirmed that our proposed theory corresponds to the experimental results for etching rates in all directions of alpha-quartz. We believe that the results of these simulations lead to the development of a three-dimensional CAD system for the precision design of complex-shaped objects to be fabricated by anisotropic etching of alpha-quartz.

Corresponding author: Hisanori Hayashi


Cite this article
Hisanori Hayashi and Toshitsugu Ueda, Simulation of Anisotropic Etching of Alpha-Quartz for Computer-Aided-Design System, Sens. Mater., Vol. 17, No. 4, 2005, p. 167-177.



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