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Vol. 32, No. 8(2), S&M2292

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Sensors and Materials
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Sensors and Materials, Volume 15, Number 7 (2003)
Copyright(C) MYU K.K.
pp. 381-391
S&M536 Research Paper in Biosensors and Related Areas
Published: 2003

Monolithic Fabrication of Wireless Miniaturized Quartz Crystal Microbalance (QCM-R) Arrays and their Application for Biochemical Sensors [PDF]

Jens Rabe, Volker Seidemann and Stephanus Buettgenbach

(Received July 30, 2003; Accepted October 22, 2003)

Keywords: QCM, microcoil, remote sensor, wireless readout, immunosensor

We report on a novel wireless quartz crystal microbalance sensor array with integrated microcoils for remote readout (QCM-R). It consists of miniaturized quartz crystal mi- crobalances solely fabricated by microfabrication batch processes including wet chemical thinning of quartz membranes, electroplating of microcoils through lithographic masks and via interconnections through the quartz substrate. Measurements with varying dis- tance between the QCM-R and readout coil showed the resonant frequency independence of the coupling. Experiments with immobilized protein A and the adsorption of its antibody proved the excellent performance of the system.

Corresponding author: Jens Rabe


Cite this article
Jens Rabe, Volker Seidemann and Stephanus Buettgenbach, Monolithic Fabrication of Wireless Miniaturized Quartz Crystal Microbalance (QCM-R) Arrays and their Application for Biochemical Sensors, Sens. Mater., Vol. 15, No. 7, 2003, p. 381-391.



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