pp. 293-302
S&M450 Research Paper of Special Issue Published: 2001 Silicon Etch Anisotropy in Tetra-Methyl Ammonium Hydroxide: Experimental and Modeling Observations [PDF] Les M. Landsberger, Anand Pandy and Mojtaba Kahrizi Cite this article Les M. Landsberger, Anand Pandy and Mojtaba Kahrizi, Silicon Etch Anisotropy in Tetra-Methyl Ammonium Hydroxide: Experimental and Modeling Observations, Sens. Mater., Vol. 13, No. 5, 2001, p. 293-302. |