pp. 479-492
S&M390 Research Paper Published: 1999 Piezoresistive Accelerometer Fabricated by Selective Formation and Etching of Porous Silicon [PDF] Jun-Hwan Sim, Chan-Seob Cho, Jin-Sup Kim, Jung-Hee Lee and Jong-Hyun Lee Cite this article Jun-Hwan Sim, Chan-Seob Cho, Jin-Sup Kim, Jung-Hee Lee and Jong-Hyun Lee, Piezoresistive Accelerometer Fabricated by Selective Formation and Etching of Porous Silicon, Sens. Mater., Vol. 11, No. 8, 1999, p. 479-492. |