pp. 113-128
S&M318 Research Paper Published: 1998 A Novel Cold-Wall MOCVD Method for Fabrication of a Durable Micro-Machined SnO2 Gas Sensor [PDF] Yuichiro Okajima, Takahiro Ide, Kei Kikuchi and Ken-ichi Nakamura Cite this article Yuichiro Okajima, Takahiro Ide, Kei Kikuchi and Ken-ichi Nakamura, A Novel Cold-Wall MOCVD Method for Fabrication of a Durable Micro-Machined SnO2 Gas Sensor, Sens. Mater., Vol. 10, No. 2, 1998, p. 113-128. |