pp. 251-270
S&M244 Research Paper Published: 1996 Modeling Electrostatically Deflectable Microstructures and Air Damping Effects [PDF] H. M. Reuther, M. Weinmann, M. Fischer, W. von Münch and F. Aβmus Cite this article H. M. Reuther, M. Weinmann, M. Fischer, W. von Münch and F. Aβmus, Modeling Electrostatically Deflectable Microstructures and Air Damping Effects, Sens. Mater., Vol. 8, No. 5, 1996, p. 251-270. |